

| Optical Loss | Max. Bandwidth | Half-Wave Voltage Vπ | Extinction Ratio | Chip Length | Linearity | Integration | Cost | |
|---|---|---|---|---|---|---|---|---|
| LiNbO3 | ||||||||
| InP | ||||||||
| SiPh | ||||||||
| TFLN | Excellent | Excellent | Excellent | Excellent | Medium | Excellent | Medium | Medium |

低损耗波导间垂直耦合技术
面向4英寸与6英寸异质晶圆的铌酸锂及电极加工工艺
面向4英寸与6英寸异质晶圆的精密切割与抛光工艺
面向4英寸/6英寸异质晶圆的晶圆与芯片测试